Spectroscopic Ellipsometer

SE200BM Ellipsometer

Ellipsometers are instruments used investigating the dielectric properties of thin films. Values such as refractive index and dielectric function of materials can be easily determined. This is done by measuring the changes of polarization upon reflection or transmission of light and comparing it to a model. Ellipsometry has found many applications in semiconductor physics, microelectronics and biology as it provides unequaled capabilities for thin film technology.

The SE200BM has the capabilities of manually varying the incident angle at 5 degree intervals and it covers DUV to NIR range (250 to 1100nm).